4 edition of Defect engineering in semiconductor growth, processing, and device technology found in the catalog.
Includes bibliographical references and indexes.
|Statement||editors, S. Ashok ... [et al.].|
|Series||Materials Research Society symposium proceedings,, v. 262, Materials Research Society symposia proceedings ;, v. 262.|
|LC Classifications||QC611.6.D4 D4183 1992|
|The Physical Object|
|Pagination||xix, 1144 p. :|
|Number of Pages||1144|
|LC Control Number||92023182|
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Get this from a library. processing Defect engineering in semiconductor growth, processing, and device technology: symposium held April May 1,San Francisco, California, U.S.A.
[S Ashok;]. Semiconductor manufacturing process: Hitachi High-Tech. Growth of Semiconductor Materials. •Defect engineering and the role of impurities and defects. •Characterization techniques, and advanced analytical techniques for metallic and non.
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